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Fundamental Principles of Engineering Nanometrology

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and ma… Read more

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Description

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

Key features

  • Provides a basic introduction to measurement and instruments
  • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
  • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
  • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
  • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Readership

Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers

Table of contents

1. Introduction to metrology for micro- and nanotechnology

2. Some basics of measurement

3. Precision measurement instrumentation - some design principles

4. Length traceability using interferometry

5. Displacement measurement

6. Surface topography measurement instrumentation

7. Scanning probe and particle beam microscopy

8. Surface topography characterisation

9. Co-ordinate metrology

10. Mass and force measurement
References
Appendix A SI units of measurement and their realisation at NPL
Appendix B SI derived units

Product details

About the author

RL

Richard Leach

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati
Affiliations and expertise
National Physical Laboratory, UK

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