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Elsevier

Handbook of Semiconductor Wafer Cleaning Technology

Science, Technology and Applications

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly… Read more

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Description

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co

Table of contents

Overview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU

Product details

About the editor

WK

Werner Kern

Affiliations and expertise
Lam Research, San Diego, CA, USA

About the author

WK

Werner Kern

Affiliations and expertise
Lam Research, San Diego, CA, USA