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Ion Implantation

Treatise on Materials Science and Technology, Vol. 18

  • 1st Edition - January 1, 1980
  • Latest edition
  • Editor: J. K. Hirvonen
  • Language: English

Treatise on Materials Science and Technology, Volume 18: Ion Implantation is a compendium of the active areas of ion implantation in materials science and technology. Topics… Read more

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Description

Treatise on Materials Science and Technology, Volume 18: Ion Implantation is a compendium of the active areas of ion implantation in materials science and technology. Topics covered range from the basic to the applied aspects of metallurgy, chemistry, and solid-state physics. The focus is on the non-electronic applications of ion implantation in materials, with main emphasis on metals. Comprised of 11 chapters, this volume begins with an overview of ion implantation, including its characteristics and history; advantages and limitations; status of industrial applications; and equipment and costs. The discussion then turns to ion bombardment effects on material composition; the use of ion implantation in investigating alloys that consist primarily of thermodynamic equilibrium phases; and the formation of metastable phases in alloys during the implantation process. Subsequent chapters deal with the use of ion implantation to study superconductivity as well as the behavior of hydrogen in solids; the effect of ion implantation on aqueous corrosion; manufacturing applications of ion implantation; and chemical properties of ion-implanted materials. The book concludes with an analysis of the optical effects of ion implantation. This monograph will be a useful resource for practitioners and researchers in the fields of physics, metallurgy, chemistry, and materials science.

Table of contents


List of Contributors

Foreword

Preface


1 Introduction

I. Characteristics of Ion Implantation

II. Historical Perspective and Scope of Present Volume

III. Ion Implantation—Advantages and Limitations of Technique

IV. Status of Industrial Applications of Ion Implantation

V. Ion-Implantation Equipment and Costs

References


2 Ion Bombardment Effects on Material Composition

I. Introduction

II. Effects of Ion Bombardment

III. Sputtering of Alloys and Compounds

IV. High-Dose Ion Implantation

V. Conclusion

References


3 Implantation Metallurgy—Equilibrium Alloys

I. Introduction

II. General Properties

III. Experimental Characterization

IV. Applications

V. Conclusion

References


4 Implantation Metallurgy—Metastable Alloy Formation

I. Introduction

II. Dilute Alloys—Experimental

III. Concentrated Alloys—Experimental

IV. Compound and Precipitate Formation

V. Mechanisms for Formation of Implanted Layer Structures

VI. Conclusions

References


5 Ion Implantation Studies of Hydrogen in Solids

I. Introduction

II. Fundamental Implantation Parameters

III. Experimental Techniques

IV. Hydrogen Implantation Studies of Metals

V. Semiconductors and Insulators

VI. Applications

References


6 The Application of Ion Implantation to Aqueous Corrosion

I. Introduction to Corrosion

II. Effect of Ion Implantation on Aqueous Corrosion

III. Corrosion Behavior of Amorphous Metals

IV. Use of Ion Implantation in Studies of Corrosion Mechanisms

V. Conclusions and Future Trends

Appendix

References


7 Thermal Oxidation

I. Introduction

II. The Oxidation of Metals

III. The Oxidation of Alloys

IV. Ion Implantation of Metals

V. Observations on Implanted Metals

VI. Practical Applications of Ion Implantation for Oxidation Resistance

References


8 Tribological and Mechanical Properties

I. Introduction

II. Wear Mechanisms

III. Contact Mechanisms During Friction

IV. Ion Implantation and Adhesion

V. Wear

VI. Microhardness

VII. Fatigue

VIII. Industrial Applications of Ion Implantation in Mechanical Property Improvement

References


9 Chemical Properties of Ion Implanted Materials

I. Introduction

II. Analytical Methods for Studying the Chemical Properties of Ion Implanted Materials

III. Radiation Chemistry of Implanted Materials

IV. The Chemical State and the Reactions of Implanted Atoms

V. Applications of Ion Bombarded Materials in Chemistry

References


10 Superconductivity

1. Introduction

II. Disordered Systems

III. Metastable Alloys

IV. Compounds

V. Applications

VI. Conclusions

References


11 Optical Effects of Ion Implantation

I. Introduction

II. Optical Waveguides and Components for Electro-Optics

III. Implantation: Index and Annealing Changes

IV. Optical Properties of Implanted Semiconductors

V. Luminescence: General Considerations

VI. Optical Absorption

VII. Conclusions

References

Index

Contents of Previous Volumes

Product details

  • Edition: 1
  • Latest edition
  • Published: February 16, 2016
  • Language: English

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