Skip to main content
Elsevier
View Cart

SEM Microcharacterization of Semiconductors

  • 1st Edition, Volume 12 - January 28, 1989
  • Latest edition
  • Editors: D. B. Holt, D. C. Joy
  • Language: English

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes… Read more

World Book Day celebration

Where learning shapes lives

Up to 25% off trusted resources that support research, study, and discovery.

Explore resources

Description

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

Readership

Condensed matter physicists, surface and materials scientists, electronic and optics engineers, and solid state chemists.

Table of contents

Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.

Product details

  • Edition: 1
  • Latest edition
  • Volume: 12
  • Published: January 28, 1989
  • Language: English

About the editors

DH

D. B. Holt

Affiliations and expertise
Imperial College of Science and Technology

DJ

D. C. Joy

Affiliations and expertise
University of Tennessee

View book on ScienceDirect

Read SEM Microcharacterization of Semiconductors on ScienceDirect