Silicides for VLSI Applications
- 1st Edition - March 28, 1983
- Latest edition
- Author: Shyam P. Murarka
- Language: English
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published… Read more
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Description
Description
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Readership
Readership
It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.
Table of contents
Table of contents
Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.
Product details
Product details
- Edition: 1
- Latest edition
- Published: December 2, 2012
- Language: English
About the author
About the author
SM
Shyam P. Murarka
Affiliations and expertise
Bell Telephone LaboratoriesView book on ScienceDirect
View book on ScienceDirect
Read Silicides for VLSI Applications on ScienceDirect