Silicon Integrated Circuits

List of Contributors

Preface

Physics of the MOS Transistor

I. Introduction

II. The MOS Capacitor

III. Flatband Voltage

IV. The OSFET

V. Nonuniform Doping

VI. Short Channel Effects

VII. MOSFET Structures

VIII. Conclusion

Appendix

References

Nonvolatile Memories

I. Introduction

II. MIOS Devices

III. Floating Gate Devices

IV. Technology for Nonvolatile Semiconductor Memories

V. Problems Relating to Testing and Reliability

References

The Properties of Silicon-on-Sapphire Substrates, Devices, and Integrated Circuits

I. Introduction

II. Sapphire Substrates

III. Preparation and Properties of Silicon Films on Sapphire (SOS)

IV. SOS Process and Device Technology

V. SOS Integrated Circuits and Systems

VI. Conclusions

References

Author Index

Subject Index