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Elsevier

Surface Metrology for Micro- and Nanofabrication

  • 1st Edition - October 21, 2020
  • Latest edition
  • Author: Wei Gao
  • Language: English

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or compon… Read more

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Description

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

Key features

  • Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
  • Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
  • Assesses the best techniques for repairing micro-defects

Readership

Academics and R&D industry researchers in Materials Science, Engineering, and Nanotechnology

Table of contents

1. Noncontact Scanning Electrostatic Force Microscope2. Quartz Tuning Fork Atomic Force Microscope3. Micropipette Ball Probing System4. Low-Force Elastic Beam Surface Profiler5. Linear-Scan Micro Roundness Measuring Machine6. Micro-Gear Measuring Machine7. On-Machine Length Gauge Surface Profiler8. On-Machine Air-Bearing Surface Profiler9. On-Machine Atomic Force Microscope10. On-Machine Roll Profiler11. In-Process Fast Tool Servo Profiler12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness

Product details

  • Edition: 1
  • Latest edition
  • Published: October 21, 2020
  • Language: English

About the author

WG

Wei Gao

Prof. Wei Gao is the Chair of the Precision Nanometrology Laboratory and Director of the Research Center for Precision Nanosystems at the Department of Fine Mechanics in the Graduate School of Engineering, Tohoku University, Japan. His research focuses on precision engineering, precision metrology, micro/nano-nanometrology, optical sensors, surface metrology, on-machine and in-process measurement, and motion measurement.
Affiliations and expertise
Chair, Precision Nanometrology Laboratory; Director, Research Center for Precision Nanosystems, Department of Fine Mechanics, Graduate School of Engineering, Tohoku University, Japan

View book on ScienceDirect

Read Surface Metrology for Micro- and Nanofabrication on ScienceDirect